Optical correction capability of piezoelectric deformable mirror based on unimorph microactuator array

被引：0
|
作者：
Ma, Jianqiang [1 ]
Liu, Yong [1 ]
Liu, Ying [1 ]
Li, Baoqing [1 ]
Chu, Jiaru [1 ]
机构：
[1] Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Hefei 230027, Anhui, Peoples R China
来源：
INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2011: SENSOR AND MICROMACHINED OPTICAL DEVICE TECHNOLOGIES | 2011年 / 8191卷
关键词：
Adaptive optics; piezoelectric deformable mirror; correction capability; Zernike polynomials; ADAPTIVE OPTICS; MEMBRANE;
D O I：
10.1117/12.900181
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Piezoelectric DM based on unimorph microactuator array has advantages of large stroke with low voltage and high operating bandwidth. In this paper, we estimate the correction capability of this DM by fitting Zernike polynomials shapes. First, the influences of actuator arrangement, actuator number and coupling on correction capability were investigated to optimize the correction performance. Then low-order Zernike shapes were reproduced by a fabricated DM using measured influence function matrix. Experiment and simulation results show that the DM has a satisfying correction performance.
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页数：6
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