Precise positioning of piezo-actuated stages using hysteresis-observer based control

被引：151
|
作者：
Lin, Chih-Jer [1 ]
Yang, Sheng-Ren [1 ]
机构：
[1] Da Yeh Univ, Dept Mech & Automat Engn, Da Tsuen 51505, Chang Hwa Count, Taiwan
来源：
MECHATRONICS | 2006年 / 16卷 / 07期
关键词：
modelling; quadratic programming; parameter estimation; observers; real-time;
D O I：
10.1016/j.mechatronics.2006.03.005
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The piezo-actuated stages are composed of the piezoelectric actuator and the positioning, mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behaviour of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward. compensating based on the hysteresis observer is proposed in this paper. To verify the consistency of the proposed method, the experiments are implemented by real-time control to be compared with the numerical simulation. (C) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码：417 / 426
页数：10
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