Adaptive Control for Piezo-Actuated Stage

被引：0
|
作者：
Chen, Xinkai [1 ]
机构：
[1] Shibaura Inst Technol, Dept Elect Informat Syst, Minuma Ku, 307 Fukasaku, Saitama, Saitama 3378570, Japan
来源：
2019 1ST INTERNATIONAL CONFERENCE ON INDUSTRIAL ARTIFICIAL INTELLIGENCE (IAI 2019) | 2019年
基金：
日本学术振兴会;
关键词：
HYSTERESIS; COMPENSATION; SYSTEMS;
D O I：
10.1109/iciai.2019.8850789
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
引用
收藏
页数：6
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