Research on the dynamic performance of MEMS micromirrors

被引：3
|
作者：
Dai, EG [1 ]
Matin, MA
Guan, Y
机构：
[1] Peking Univ, Dept Elect, Beijing 100871, Peoples R China
[2] Univ Denver, Dept Engn, Denver, CO 80208 USA
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2002年 / 35卷 / 02期
关键词：
MEMS micromirror; dynamic performance;
D O I：
10.1002/mop.10531
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a series of dynamic problems in developing and characterizing micromirror. A new application of MEMS micromirror-based fast tunable VCSEL in wavelength routing switching has been proposed. The micromirror dynamic design aspects such as working modal selection, modal sequence shift, dynamic deformation, and electrical parameter fluctuation have been studied. (C) 2002 Wiley Periodicals, Inc.
引用
收藏
页码：111 / 113
页数：3
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