Research on stroboscopic synchronous control system in MEMS dynamic testing

In order to acquire clear images of high-speed MEMS device a set of stroboscopic synchronous control system is designed. It gives full preparation to extract and analysis dynamic characteristics of MEMS devices. It is an important part of MEMS dynamic testing system. Based on the principle of stroboscopic imaging stroboscopic synchronous control system controls arbitrary waveform generator to generates MEMS device actuating signal, stroboscopic controlling signal, controlling signal for CCD and working signal for image acquisition card in order to assure them coordinated working. And combining virtual instrument technique sequential logic signal is designed to control all of them ordered output through software. All kinds of errors are analyzed and methods are present to compensate. So the performance of control system is increased. Experimental results indicate that when testing in-plane motion of MEMS the resulting velocity limit is 5.1m/s for 50 X magnification, measuring resolution is better than 180nm and measuring repeatability reaches to 40nm.