Thermal characterization of a microheater for micromachined gas sensors

被引：81
|
作者：
Baroncini, M
Placidi, P
Cardinali, GC
Scorzoni, A
机构：
[1] Dipartimento Ingn Elettron & Informaz, Perugia, Italy
[2] CNR IMM, Sez Bologna, I-40129 Bologna, Italy
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 115卷 / 01期
关键词：
dc characterization; microhotplate; microheater resistor; temperature of active area; thermal model; gas sensors;
D O I：
10.1016/j.sna.2004.03.012
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a new four-point probe, double spiral heating element configuration for micromachined gas sensors is proposed and a simple analytical model of the steady-state thermal behavior of the microheater is presented. A testing procedure is suggested, based on simple two-wire and four-wire resistance versus power measurements, together with an iterative extraction procedure for the parameters of the thermal model. This allowed us to accurately extract the sensor active area temperature as a function of the total power dissipated on the microheater. (C) 2004 Published by Elsevier B.V.
引用
收藏
页码：8 / 14
页数：7
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