Thermal characterization of a microheater for micromachined gas sensors

被引：81
|
作者：
Baroncini, M
Placidi, P
Cardinali, GC
Scorzoni, A
机构：
[1] Dipartimento Ingn Elettron & Informaz, Perugia, Italy
[2] CNR IMM, Sez Bologna, I-40129 Bologna, Italy
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 115卷 / 01期
关键词：
dc characterization; microhotplate; microheater resistor; temperature of active area; thermal model; gas sensors;
D O I：
10.1016/j.sna.2004.03.012
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a new four-point probe, double spiral heating element configuration for micromachined gas sensors is proposed and a simple analytical model of the steady-state thermal behavior of the microheater is presented. A testing procedure is suggested, based on simple two-wire and four-wire resistance versus power measurements, together with an iterative extraction procedure for the parameters of the thermal model. This allowed us to accurately extract the sensor active area temperature as a function of the total power dissipated on the microheater. (C) 2004 Published by Elsevier B.V.
引用
收藏
页码：8 / 14
页数：7
相关论文
共 50 条
  • [11] Thermal and mechanical aspects for designing micromachined low-power gas sensors
    Gotz, A
    Gracia, I
    Cane, C
    LoraTamayo, E
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (03) : 247 - 249
  • [12] Silicon micromachined sensors for gas detection
    Moldovan, C
    Vasile, G
    Modreanu, M
    FRONTIERS OF MULTIFUNCTIONAL INTEGRATED NANOSYSTEMS, 2004, 152 : 409 - 422
  • [13] Micromachined gas sensors for environmental pollutants
    Faglia, G
    Comini, E
    Pardo, M
    Taroni, A
    Cardinali, G
    Nicoletti, S
    Sberveglieri, G
    MICROSYSTEM TECHNOLOGIES, 1999, 6 (02) : 54 - 59
  • [14] Micromachined silicon CO gas sensors
    Lyle, RP
    Hughes, HG
    Walters, D
    PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON MICROSTRUCTURES AND MICROFABRICATED SYSTEMS, 1997, 97 (05): : 188 - 198
  • [15] Design and fabrication of micromachined gas sensors
    Hiskia
    Siregar, Masbah R. T.
    Mulijono, Moch.
    2006 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2006, : 98 - +
  • [16] Micromachined gas sensors for environmental pollutants
    G. Faglia
    E. Comini
    M. Pardo
    A. Taroni
    G. Cardinali
    S. Nicoletti
    G. Sberveglieri
    Microsystem Technologies, 1999, 6 : 54 - 59
  • [17] Micromachined silicon microstructures for gas sensors
    Amírola, J
    Rodríguez, A
    Castañer, L
    Horrillo, MC
    Gutiérrez, FJ
    2005 Spanish Conference on Electron Devices, Proceedings, 2005, : 569 - 572
  • [18] Characterization of micromachined sensors for nanoscale detection
    Yu, XM
    Jiang, XL
    2001 INTERNATIONAL WORKSHOP ON BIO-ROBOTICS AND TELEOPERATION, PROCEEDINGS, 2001, : 266 - 270
  • [19] Fabrication of thin film microheater for gas sensors on polyimide membrane
    Aslam, M
    Hatfield, JV
    PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2, 2003, : 389 - 392
  • [20] A simple interface circuit for micromachined gas sensors
    Baroncini, M
    Placidi, P
    Cardinali, GC
    Scorzoni, A
    SENSORS AND ACTUATORS A-PHYSICAL, 2003, 109 (1-2) : 131 - 136
12345