Development of a dedicated instrumentation for electrical and thermal characterization of chemiresistive gas sensors

被引:5
|
作者
Della Ciana, M. [1 ,2 ]
Valt, M. [1 ]
Fabbri, B. [1 ]
Bernardoni, P. [1 ]
Guidi, V [1 ]
Morandi, V [2 ]
机构
[1] Univ Ferrara, Dept Phys & Earth Sci, Via Giuseppe Saragat 1-C, I-44122 Ferrara, Italy
[2] CNR, Inst Microsyst & Microelect IMM, Via Gobetti 101, I-40129 Bologna, Italy
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2021年 / 92卷 / 07期
关键词
SNO2;
D O I
10.1063/5.0053635
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This work presents the design and validation of a measuring instrumentation for an easy, complete, and tunable characterization of chemiresistive gas sensors based on metal-oxide semiconductors. The equipment, described in depth both as hardware and as software, was designed to monitor the electrical behavior of gas sensors in controlled thermodynamic conditions. The main goal of this setup is to synchronize the electrical characterization with different measuring conditions, i.e., operating temperature, relative humidity, and gas target concentration. This operation allows us to automate various measurement protocols, otherwise impossible to obtain manually. In particular, this instrumentation permits to correlate the response of a chemiresistive gas sensor to the applied voltage, to its working temperature, and to the gas concentration, automating the acquisition of the current-voltage characteristic and the current-temperature characteristic (Arrhenius plot) of sensing films. The experimental setup was validated by reporting the electrical characterization of a standard metal-oxide-based gas sensing material, such as SnO2, working under different thermodynamic conditions.
引用
收藏
页数:11
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