An efficient Monte Carlo simulator for low-pressure RF plasmas

被引：1
|
作者：
Ardehali, M
Matsumoto, H
机构：
[1] Microelectronics Research Laboratories, NEC Corporation, Sagamihara, Kanagawa 229
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 1997年 / 25卷 / 05期
关键词：
particle-in-cell Monte Carlo simulation; plasma sheath; split technique; statistical noise;
D O I：
10.1109/27.649629
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
An efficient, self-consistent Particle-in-Cell/Monte Carlo (PIC/MC) plasma simulator has been developed, The simulator features an effective method to increase the number of MC particles belonging to the sheath by splitting the particles and by adjusting their statistical weight, This splitting technique leads to substantial reduction of statistical noise within the sheath, The simulator has been used to model a radio frequency (RF) plasma at a pressure of 20 mTorr, The results of this simulator are compared with the results of the standard PIC/MC simulator.
引用
收藏
页码：1081 / 1085
页数：5
相关论文
共 50 条
  • [1] EFFICIENT UTILIZATION OF AN RF POWER OSCILLATOR FOR PRODUCING LOW-PRESSURE PLASMAS
    KOFOID, MJ
    [J]. INTERNATIONAL JOURNAL OF ELECTRONICS, 1966, 21 (04) : 381 - &
  • [2] NUMERICAL MODELING OF LOW-PRESSURE RF PLASMAS
    VENDER, D
    BOSWELL, RW
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1990, 18 (04) : 725 - 732
  • [3] MODELING OF LOW-PRESSURE REACTIVE RF PLASMAS
    WINKLER, R
    WILHELM, J
    [J]. PHYSICA SCRIPTA, 1988, T23 : 264 - 270
  • [4] MONTE-CARLO LOW-PRESSURE DEPOSITION PROFILE SIMULATIONS
    REY, JC
    CHEN, LY
    MCVITTIE, JP
    SARASWAT, KC
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 1083 - 1087
  • [5] Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas
    Park, Chan-Won
    Horvath, B.
    Derzsi, A.
    Schulze, J.
    Kim, J. H.
    Donko, Z.
    Lee, Hyo-Chang
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2023, 32 (11):
  • [6] Scaling characteristics of plasma parameters for low-pressure oxygen RF discharge plasmas
    Chung, TH
    Seo, DC
    Kim, GH
    Kim, JS
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 2001, 29 (06) : 970 - 973
  • [7] Collision Frequency Determination of Low-Pressure Plasmas based on RF-Reflectometry
    Schulz, Christian
    Rolfes, Ilona
    Oberberg, Moritz
    Awakowicz, Peter
    [J]. 2016 46TH EUROPEAN MICROWAVE CONFERENCE (EUMC), 2016, : 807 - 810
  • [8] Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo
    Kim, Jin Seok
    Hur, Min Young
    Song, In Cheol
    Lee, Ho-Jun
    Lee, Hae June
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 2014, 42 (12) : 3819 - 3824
  • [9] Low-pressure phase diagram of crystalline benzene from quantum Monte Carlo
    Azadi, Sam
    Cohen, R. E.
    [J]. JOURNAL OF CHEMICAL PHYSICS, 2016, 145 (06):
  • [10] PARTICLE CHARGING IN LOW-PRESSURE PLASMAS
    MATSOUKAS, T
    RUSSELL, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) : 4285 - 4292
12345