An efficient Monte Carlo simulator for low-pressure RF plasmas

被引：1
|
作者：
Ardehali, M
Matsumoto, H
机构：
[1] Microelectronics Research Laboratories, NEC Corporation, Sagamihara, Kanagawa 229
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 1997年 / 25卷 / 05期
关键词：
particle-in-cell Monte Carlo simulation; plasma sheath; split technique; statistical noise;
D O I：
10.1109/27.649629
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
An efficient, self-consistent Particle-in-Cell/Monte Carlo (PIC/MC) plasma simulator has been developed, The simulator features an effective method to increase the number of MC particles belonging to the sheath by splitting the particles and by adjusting their statistical weight, This splitting technique leads to substantial reduction of statistical noise within the sheath, The simulator has been used to model a radio frequency (RF) plasma at a pressure of 20 mTorr, The results of this simulator are compared with the results of the standard PIC/MC simulator.
引用
收藏
页码：1081 / 1085
页数：5
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