MODELING OF LOW-PRESSURE REACTIVE RF PLASMAS

被引：6

|

作者：

WINKLER, R

WILHELM, J

机构：

来源：

PHYSICA SCRIPTA | 1988年 / T23卷

关键词：

D O I：

10.1088/0031-8949/1988/T23/049

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：264 / 270

页数：7

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