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MODELING OF LOW-PRESSURE REACTIVE RF PLASMAS

被引：6
|
作者：
WINKLER, R
WILHELM, J
机构：
来源：
PHYSICA SCRIPTA | 1988年 / T23卷
关键词：
D O I：
10.1088/0031-8949/1988/T23/049
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：264 / 270
页数：7
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