Surface chemistry of the growth and doping of InGaAs by metalorganic chemical vapor deposition.

被引:0
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作者
Hicks, RF [1 ]
Li, L [1 ]
Kappers, M [1 ]
Qi, H [1 ]
Gan, S [1 ]
Han, B [1 ]
机构
[1] UNIV CALIF LOS ANGELES,DEPT CHEM ENGN,LOS ANGELES,CA 90095
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O6 [化学];
学科分类号
0703 ;
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页码:71 / COLL
页数:2
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