共 50 条
- [41] Surface Morphology Improvement and Repeatable Doping Characterization of 4H-SiC Epitaxy grown on 4° Off-Axis 4H-SiC Wafers SILICON CARBIDE AND RELATED MATERIALS 2008, 2009, 615-617 : 423 - 426
- [42] Surface preparation of 4° off-axis 4H-SIC substrate for epitaxial growth SILICON CARBIDE AND RELATED MATERIALS 2012, 2013, 740-742 : 225 - 228
- [47] Short-length step morphology on 4° off Si-face epitaxial surface grown on 4H-SiC substrate SILICON CARBIDE AND RELATED MATERIALS 2009, PTS 1 AND 2, 2010, 645-648 : 115 - 118
- [49] Epitaxial growth of (1120) 4H-SiC using substrate grown in the [1120] direction SILICON CARBIDE AND RELATED MATERIALS 2001, PTS 1 AND 2, PROCEEDINGS, 2002, 389-3 : 195 - 198