Formation of nano-pores in nano-crystalline diamond films

被引：24
|
作者：
Kriele, Armin [1 ]
Williams, Oliver A. [1 ]
Wolfer, Marco [1 ]
Hees, Jakob J. [1 ]
Smirnov, Waldemar [1 ]
Nebel, Christoph E. [1 ]
机构：
[1] Fraunhofer Inst Appl Solid State Phys IAF, D-79108 Freiburg, Germany
来源：
CHEMICAL PHYSICS LETTERS | 2011年 / 507卷 / 4-6期
关键词：
NANOCRYSTALLINE DIAMOND; YOUNG MODULUS; ELECTRODES; COATINGS; SURFACES;
D O I：
10.1016/j.cplett.2011.03.089
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Various nano-pores in nano-crystalline diamond (NCD) thin films have been fabricated and characterized. Therefore in this work two aspects of NCD thin films synthesized by microwave assisted chemical-vapour-deposition (MWCVD) have been investigated. Firstly, the influence of CVD-growth conditions on the film morphology and chemical grain boundary composition and their impact on the mechanical properties. Second, the formation of nano-pores by selective etching of the non-diamond phase. Freestanding NCD membranes were fabricated and bulged to calculate the Young's modulus which can reach surprisingly high values (1100 GPa) close to single crystal diamond. The presence of nano-pores was verified by electrochemical experiments where ions have been used to detect the porosity. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：253 / 259
页数：7
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