Cool plasma functionalization of nano-crystalline diamond films

被引：27
|
作者：
Ray, M. A. [1 ]
Tyler, T. [1 ]
Hook, B. [1 ]
Martin, A. [1 ]
Cunningham, G. [1 ]
Shenderova, O. [1 ]
Davidson, J. L. [2 ]
Howell, M. [2 ]
Kang, W. P. [2 ]
McGuire, G. [1 ]
机构：
[1] Int Technol Ctr, Res Triangle Pk, NC 27709 USA
[2] Vanderbilt Univ, Nashville, TN USA
来源：
DIAMOND AND RELATED MATERIALS | 2007年 / 16卷 / 12期
关键词：
CVD diamond; functionalization; fluorination; plasma;
D O I：
10.1016/j.diamond.2007.07.016
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
It was demonstrated that an atmospheric pressure dielectric barrier glow discharge system is a powerful tool for the surface functionalization of nano-crystalline diamond films. Diamond film functionalization was performed in minutes using plasma discharges generated with fluorine containing gases. The chemical bonds formed between reactive species generated in the plasma and diamond surface were confirmed by FTIR and XPS analysis. Following plasma treatment, XPS analysis revealed a high concentration of F on the diamond surface, nearly 50 atomic percent. FTIR analysis revealed the presence F-bands related to CF3 (CF2) stretching vibrations and symmetric and asymmetric CF2 vibrations. It was concluded that atmospheric pressure dielectric barrier glow discharge is a highly effective means to fluorinate diamond surfaces within a modest time. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：2087 / 2089
页数：3
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