Formation of nano-pores in nano-crystalline diamond films

被引：24
|
作者：
Kriele, Armin [1 ]
Williams, Oliver A. [1 ]
Wolfer, Marco [1 ]
Hees, Jakob J. [1 ]
Smirnov, Waldemar [1 ]
Nebel, Christoph E. [1 ]
机构：
[1] Fraunhofer Inst Appl Solid State Phys IAF, D-79108 Freiburg, Germany
来源：
CHEMICAL PHYSICS LETTERS | 2011年 / 507卷 / 4-6期
关键词：
NANOCRYSTALLINE DIAMOND; YOUNG MODULUS; ELECTRODES; COATINGS; SURFACES;
D O I：
10.1016/j.cplett.2011.03.089
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Various nano-pores in nano-crystalline diamond (NCD) thin films have been fabricated and characterized. Therefore in this work two aspects of NCD thin films synthesized by microwave assisted chemical-vapour-deposition (MWCVD) have been investigated. Firstly, the influence of CVD-growth conditions on the film morphology and chemical grain boundary composition and their impact on the mechanical properties. Second, the formation of nano-pores by selective etching of the non-diamond phase. Freestanding NCD membranes were fabricated and bulged to calculate the Young's modulus which can reach surprisingly high values (1100 GPa) close to single crystal diamond. The presence of nano-pores was verified by electrochemical experiments where ions have been used to detect the porosity. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：253 / 259
页数：7
相关论文
共 50 条
  • [21] Microwave cavity perturbation of nitrogen doped nano-crystalline diamond films
    Cuenca, Jerome A.
    Sankaran, Kamatchi Jothiramalingam
    Pobedinskas, Paulius
    Panda, Kalpataru
    Lin, I-Nan
    Porch, Adrian
    Haenen, Ken
    Williams, Oliver A.
    [J]. CARBON, 2019, 145 : 740 - 750
  • [22] Growth of highly transparent nano-crystalline diamond films by microwave CVD
    Bhusari, DM
    Chen, KH
    Yang, JR
    Lin, ST
    Wang, TY
    Chen, LC
    [J]. CHEMICAL ASPECTS OF ELECTRONIC CERAMICS PROCESSING, 1998, 495 : 131 - 137
  • [23] Deposition of nano-crystalline diamond films by excimer laser ablation of carbon
    Zhao, QX
    Dong, LF
    Fu, GS
    Shang, Y
    Wang, YS
    Wang, YJ
    [J]. LASERS IN MATERIAL PROCESSING AND MANUFACTURING, 2002, 4915 : 218 - 221
  • [24] Growth of GaN on nano-crystalline diamond substrates
    van Dreumel, G. W. G.
    Buijnsters, J. G.
    Bohnen, T.
    ter Meulen, J. J.
    Hageman, P. R.
    van Enckevort, W. J. P.
    Vlieg, E.
    [J]. DIAMOND AND RELATED MATERIALS, 2009, 18 (5-8) : 1043 - 1047
  • [25] Study of Nano-crystalline Silicon Films
    何宇亮
    刘湘娜
    王志超
    程光煦
    王路春
    于是东
    [J]. Science China Mathematics, 1993, (02) : 248 - 256
  • [26] STUDY OF NANO-CRYSTALLINE SILICON FILMS
    HE, YL
    LIU, XN
    WANG, ZC
    CHENG, GX
    WANG, LC
    YU, SD
    [J]. SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY, 1993, 36 (02): : 248 - 256
  • [27] Electrical and optical properties of nano-crystalline GaN and nano-crystalline GaN:H thin films
    Kobayashi, S
    Nonomura, S
    Abe, K
    Gotoh, T
    Hirata, S
    Nitta, S
    Kanemitsu, Y
    [J]. AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY - 1997, 1997, 467 : 373 - 378
  • [28] FORMATION AND CHARACTERISTICS OF NANO-CRYSTALLINE TIAL
    KIMURA, H
    KOBAYASHI, S
    [J]. MATERIALS TRANSACTIONS JIM, 1995, 36 (07): : 982 - 987
  • [29] Role of inert gas with hydrogen mixtures in the synthesis of nano-crystalline diamond films
    Griffin, Jelani
    Ray, Paresh Chandra
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2005, 230 : U2211 - U2211
  • [30] Morphological and phase evolution of nano-crystalline carbon films with a predominant diamond character
    Hoffman, A
    Heiman, A
    [J]. COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2002, 208 (1-3) : 121 - 129
12345