Uncooled micromachined cmos compatible IR sensing microsystems

被引：0

作者：

Socher, E ^{[1
]}

Bochobza-Degani, O ^{[1
]}

Nemirovsky, Y ^{[1
]}

机构：

[1] Technion Israel Inst Technol, Dept Elect Engn, Kidron Microelect Res Ctr, MEMS Grp, IL-32000 Haifa, Israel

来源：

ELECTRO-OPTICS AND MICROELECTRONICS, PROCEEDINGS | 2000年 / 14卷

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The paper presents design, fabrication, characterization and analysis of uncooled micromachined CMOS compatible IR sensing microsystems. The microsystems under study are thermoelectric sensors for thermal uncooled IR detection integrated monolithically on a CMOS chip containing their readout circuits. In the design, a novel optimization scheme was employed and the dependence of performance upon pixel area and aspect ratio was modeled and investigated. Two methods of fabrication were developed, backside wet bulk micromachining and front-side dry RIE micromachining.

引用

页码：221 / 224

页数：4

共 50 条

[31] Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process
Eccardt, PC
Niederer, K
ULTRASONICS, 2000, 38 (1-8) : 774 - 780
[32] Study of CMOS compatible micromachined thermopile infra-red detector array
Xu D.-H.
Xiong B.
Wang Y.-L.
Zhejiang Daxue Xuebao (Gongxue Ban)/Journal of Zhejiang University (Engineering Science), 2011, 45 (06): : 1043 - 1047+1107
[33] IR uncooled bolometers based on amorphous GexSi1-xOy on silicon micromachined structures
Iborra, E
Clement, M
Herrero, LV
Sangrador, J
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (04) : 322 - 329
[34] Micromachined uncooled IR bolometer linear array using VO2 thin films
Chen, CH
Yi, XJ
Zhang, J
Xiong, BF
INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 2001, 22 (01): : 53 - 58
[35] Modeling and characterization of CMOS readout circuits for monolithic uncooled IR thermoelectric sensors
Socher, E
Bochobza-Degani, O
Nemirovsky, Y
21ST IEEE CONVENTION OF THE ELECTRICAL AND ELECTRONIC ENGINEERS IN ISRAEL - IEEE PROCEEDINGS, 2000, : 421 - 424
[36] Nanometric CMOS-SOI-NEMS Transistor for Uncooled THz Sensing
Nemirovsky, Yael
Svetlitza, Alexander
Brouk, Igor
Stolyarova, Sara
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (05) : 1575 - 1583
[37] Monolithic CMOS readout for micromachined IR thermoelectric sensors: Modeling and characterization
Socher, E
Bochobza-Degani, O
Nemirovsky, Y
SENSORS AND MICROSYSTEMS, 2000, : 475 - 479
[38] Semiconducting YBaCuO microbolometers for uncooled broad-band IR sensing
Almasri, M
Çelik-Butler, Z
Butler, DP
Yaradanakul, A
Yildiz, A
INFRARED TECHNOLOGY AND APPLICATIONS XXVII, 2001, 4369 : 264 - 273
[39] Low-power micromachined microsystems
Najafi, K
ISLPED '00: PROCEEDINGS OF THE 2000 INTERNATIONAL SYMPOSIUM ON LOW POWER ELECTRONICS AND DESIGN, 2000, : 1 - 8
[40] THE RF CHARACTERISTICS OF MICROMACHINED COPLANAR WAVEGUIDE IN 0.13 μm CMOS TECHNOLOGY BY CMOS COMPATIBLE ICP DRY ETCHING
Wang, Tao
Lu, Shey-Shi
Lin, Yo-Sheng
Juang, Yin-Zong
Huang, Guo-Wei
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2009, 51 (11) : 2665 - 2668

← 1 2 3 4 5 →