Intermetallic phase transformations in Au-Al wire bonds

被引：45

作者：

Xu, H. ^{[1
]}

Liu, C. ^{[2
]}

Silberschmidt, V. V. ^{[2
]}

Pramana, S. S. ^{[3
]}

White, T. J. ^{[3
,4
]}

Chen, Z. ^{[3
]}

Acoff, V. L. ^{[1
]}

机构：

[1] Univ Alabama, Dept Met & Mat Engn, Tuscaloosa, AL 35487 USA

[2] Univ Loughborough, Wolfson Sch Mech & Mfg Engn, Loughborough LE11 3TU, Leics, England

[3] Nanyang Technol Univ, Sch Mat Sci & Engn, Singapore 639798, Singapore

[4] Australian Natl Univ, Ctr Adv Microscopy, Canberra, ACT 2601, Australia

来源：

INTERMETALLICS | 2011年 / 19卷 / 12期

关键词：

Aluminides; Phase transformation; Wire bonding; Microstructure; Electron microscopy; GOLD BALL BONDS; COMPOUND FORMATION; CRYSTAL-STRUCTURE; ALUMINUM; COPPER; GROWTH; DEGRADATION; COUPLES; VOIDS; FILMS;

D O I：

10.1016/j.intermet.2011.07.003

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

This paper describes the crystallochemical mechanisms that underpin the migration of nano-size alumina, intermetallic growth and phase transformations in Au-Al wire bonds during annealing from 175 degrees C to 250 degrees C by utilizing high-resolution transmission electron microscopy (HRTEM). Alumina, encapsulated within the Au-Al intermetallic compounds (IMCs), migrates towards the Au ball during annealing, with Au diffusion into the Al pad. The sequence of Au-Al IMC phase development during annealing was investigated. Initially. Au(8)Al(3) appears as a third phase between the Au(4)Al and AuAl(2) layers that form during bonding, and gradually becomes the dominant compound. Both AuAl(2) and Au(8)Al(3) are transformed into the Au-rich alloyAu(4)Al when Al is completely consumed, and this is the terminal product. (C) 2011 Elsevier Ltd. All rights reserved.

引用

页码：1808 / 1816

页数：9

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