Bulk micromachining for sensors and actuators

被引：0

作者：

Esashi, M ^{[1
]}

机构：

[1] Tohoku Univ, New Ind Creat Hatchery Ctr, Sendai, Miyagi 9808579, Japan

来源：

MICROMACHINED DEVICES AND COMPONENTS VI | 2000年 / 4176卷

关键词：

D O I：

10.1117/12.395630

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：6 / 15

页数：10

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