MICROMECHANICS AND MICROMACHINING OF SEMICONDUCTOR SENSORS

被引：0
|
作者：
HOK, B
机构：
来源：
ACTA POLYTECHNICA SCANDINAVICA-ELECTRICAL ENGINEERING SERIES | 1988年 / 63期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：65 / 84
页数：20
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