Bulk micromachining for sensors and actuators

被引：0
|
作者：
Esashi, M [1 ]
机构：
[1] Tohoku Univ, New Ind Creat Hatchery Ctr, Sendai, Miyagi 9808579, Japan
来源：
MICROMACHINED DEVICES AND COMPONENTS VI | 2000年 / 4176卷
关键词：
D O I：
10.1117/12.395630
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：6 / 15
页数：10
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