Effects of shear strain on the conduction band in silicon: An efficient two-band k.p theory

被引:18
|
作者
Sverdlov, Viktor [1 ]
Ungersboeck, Enzo [1 ]
Kosina, Hans [1 ]
Selberherr, Siegfried [1 ]
机构
[1] Vienna Univ Technol, Inst Microelect, A-1040 Vienna, Austria
关键词
D O I
10.1109/ESSDERC.2007.4430959
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present an efficient two-band k.p theory which accurately describes the six lowest conduction band valleys in silicon. By comparing the model with full band pseudo-potential calculations we demonstrate that the model captures both the nonparabolicty effects and the stress-induced band structure modification for general stress conditions. It reproduces the stress dependence of the effective masses and the nonparabolicity parameter. Analytical expressions for the valley shifts and the transversal and longitudinal effective mass modifications induced by uniaxial [110] stress are obtained and analyzed. The low-field mobility enhancement in the direction of tensile [110] stress in {001} SOI FETs with arbitrary small body thickness is due to a modification of the conductivity mass and is shown to be partly hampered by an increase in nonparabolicity at high stress value.
引用
收藏
页码:386 / 389
页数:4
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