High-frequency angular vibration calibration using the mirror assembly diffraction grating heterodyne laser interferometer

被引：2

作者：

Xue, Jingfeng ^{[1
,2
]}

Zhang, Dazhi ^{[2
]}

Li, Xinliang ^{[2
]}

Zhao, Weiqian ^{[1
]}

机构：

[1] Beijing Inst Technol, Collage Opt Elect, Beijing 100081, Peoples R China

[2] Key Lab Sci & Technol Natl Metrol & Calibrat, Beijing 100095, Peoples R China

来源：

7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT | 2014年 / 9282卷

关键词：

Angular vibration; High-frequency; Micro-amplitude; Diffraction grating; heterodyne interferometer;

D O I：

10.1117/12.2067780

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to improve the dynamic evaluating capabilities of the inertial devices and realize the traceability in angular vibration, the angular vibration calibration devices are developed and it is very important to measure the angular vibration accurately for calibration devices. In this paper, a new diffraction grating heterodyne laser interferometer method was introduced for high-frequency and micro-amplitude angular-vibration measurement, which uses a differential and symmetrical optical-path arrangement. The proposed method has the advantages of high-precision, high anti-interference and convenient debugging, and could achieve the angular measurement resolution within 0.02".

引用

页数：6

共 50 条

[1] A high-frequency angular vibration calibration system based on phase modulated laser interferometer technique
Wang, Xianfan
Yang, Jianhua
Huang, Tengchao
Shu, Xiaowu
[J]. AOPC 2021: MICRO-OPTICS AND MOEMS, 2021, 12066
[2] Angular vibration measurement using grating and laser interferometer
Zhang, Li
Peng, Jun
[J]. SEVENTH INTERNATIONAL CONFERENCE ON VIBRATION MEASUREMENTS BY LASER TECHNIQUES: ADVANCES AND APPLICATIONS, 2006, 6345
[3] Primary vibration calibration by laser heterodyne interferometer
Zhou, Lun-Bin
[J]. Jiliang Xuebao/Acta Metrologica Sinica, 2003, 24 (03):
[4] Calibration of high-frequency hydrophone up to 40 MHz by heterodyne interferometer
Yang, Ping
Xing, Guangzhen
He, Longbiao
[J]. ULTRASONICS, 2014, 54 (01) : 402 - 407
[5] A VIBRATION COMPENSATED HIGH-FREQUENCY HETERODYNE CO2-LASER INTERFEROMETER FOR PLASMA DIAGNOSTICS
GOWERS, CW
LAMB, C
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1982, 15 (03): : 343 - 346
[6] High-Frequency Vibration Sensor Using a Fiber Laser With a Multicore Fiber Interferometer
Correa, Angel I.
Galarza, Marko
Dauliat, Romain
Jamier, Raphael
Roy, Philippe
Lopez-Amo, Manuel
Perez-Herrera, Rosa A.
[J]. IEEE SENSORS JOURNAL, 2024, 24 (06) : 7656 - 7662
[7] Strain measurement using high-frequency diffraction grating
Ma, Yaowu
Kurita, Masanori
[J]. Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 1994, 60 (577): : 2144 - 2143
[8] Measurement of small wavelength shift using diffraction grating and high-angular-sensitivity total-internal-reflection heterodyne interferometer
Lin, Jiun-You
Jhuang, Jing-Hsiang
Hsieh, Meng-Chang
Chang, Chia-Ou
[J]. OPTICS AND LASERS IN ENGINEERING, 2018, 100 : 155 - 160
[9] STRAIN-MEASUREMENT USING HIGH-FREQUENCY DIFFRACTION GRATING
MA, YW
KURITA, M
[J]. JSME INTERNATIONAL JOURNAL SERIES A-MECHANICS AND MATERIAL ENGINEERING, 1993, 36 (03): : 309 - 313
[10] Measurement method for roll angular displacement with a high resolution by using diffraction gratings and a heterodyne interferometer
Tang, Shanzhi
Wang, Zhao
Gao, Jianmin
Guo, Junjie
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (04):

← 1 2 3 4 5 →