High-frequency angular vibration calibration using the mirror assembly diffraction grating heterodyne laser interferometer

被引：2
|
作者：
Xue, Jingfeng [1 ,2 ]
Zhang, Dazhi [2 ]
Li, Xinliang [2 ]
Zhao, Weiqian [1 ]
机构：
[1] Beijing Inst Technol, Collage Opt Elect, Beijing 100081, Peoples R China
[2] Key Lab Sci & Technol Natl Metrol & Calibrat, Beijing 100095, Peoples R China
来源：
7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT | 2014年 / 9282卷
关键词：
Angular vibration; High-frequency; Micro-amplitude; Diffraction grating; heterodyne interferometer;
D O I：
10.1117/12.2067780
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In order to improve the dynamic evaluating capabilities of the inertial devices and realize the traceability in angular vibration, the angular vibration calibration devices are developed and it is very important to measure the angular vibration accurately for calibration devices. In this paper, a new diffraction grating heterodyne laser interferometer method was introduced for high-frequency and micro-amplitude angular-vibration measurement, which uses a differential and symmetrical optical-path arrangement. The proposed method has the advantages of high-precision, high anti-interference and convenient debugging, and could achieve the angular measurement resolution within 0.02".
引用
收藏
页数：6
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