Measurement method for roll angular displacement with a high resolution by using diffraction gratings and a heterodyne interferometer

被引:17
|
作者
Tang, Shanzhi [1 ,2 ]
Wang, Zhao [2 ]
Gao, Jianmin [3 ]
Guo, Junjie [3 ]
机构
[1] Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China
[2] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China
[3] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710054, Peoples R China
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2014年 / 85卷 / 04期
关键词
MICHELSON INTERFEROMETER; HIGH-PRECISION; ANGLE; REFLECTION;
D O I
10.1063/1.4870904
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The roll angle measurement is difficult to be achieved directly using a typical commercial interferometer due to its low sensitivity in axial direction, where the axial direction is orthogonal to the plane of the roll angular displacement. A roll angle measurement method combined diffraction gratings with a laser heterodyne interferometer is discussed in this paper. The diffraction grating placed in the plane of a roll angular displacement and the interferometer arranged in the plane's orthogonal direction, constitute the measurement pattern for the roll angle with high resolution. The roll angular displacement, considered as the linear, can be tested precisely when the corresponding angle is very small. Using the proposed method, the angle roll measurement obtains the high resolution of 0.002 ''. Experiment has proved its feasibility and practicability. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:4
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