共 50 条
- [1] Resolution-enhanced heterodyne laser interferometer with differential configuration for roll angle measurement [J]. OPTICS EXPRESS, 2018, 26 (08): : 9634 - 9644
- [4] Measurement method for roll angular displacement with a high resolution by using diffraction gratings and a heterodyne interferometer [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (04):
- [6] Laser heterodyne interferometer for simultaneous measurement of displacement and roll angle based on the acousto-optic modulators [J]. OPTICAL MICRO- AND NANOMETROLOGY VII, 2018, 10678
- [8] A Heterodyne Interferometer for Simultaneous Measurement of Roll and Straightness [J]. IEEE ACCESS, 2019, 7 : 133257 - 133264
- [9] Measurement of small angle based on a (1 0 0) silicon wafer and heterodyne interferometer [J]. Optical Review, 2016, 23 : 487 - 491
- [10] Note: Comparison experimental results of the laser heterodyne interferometer for angle measurement based on the Faraday effect [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2018, 89 (04):