Note: A small roll angle measurement method with enhanced resolution based on a heterodyne interferometer

被引:13
|
作者
Tang, S. [1 ]
Wang, Z. [2 ]
Li, M. [1 ]
Zhang, W. [1 ]
Yang, F. [1 ]
Zhang, X. [1 ]
机构
[1] Chinese Acad Sci, Inst High Energy Phys, Lab Xray Opt & Technol, Beijing 100049, Peoples R China
[2] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2015年 / 86卷 / 09期
基金
中国国家自然科学基金;
关键词
SYSTEM;
D O I
10.1063/1.4930241
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Small roll angle is hard to be measured directly by commercial interferometer instruments due to their low sensitivities in axial direction. A method for its measurement based on a heterodyne interferometer is presented, which adopts accessories including a half wave plate, a multiple-reflector, and a phase meter to achieve test by detecting phase differences between the measurement and reference arms. Mathematical model reveals the resolution will be improved by increasing pass times through the half wave plate. The theoretical resolution is up to 0.19 in. when the pass times increase to three and the phase meter resolution is 0.01 degrees. The proposed method is proved by the experiment. (C) 2015 AIP Publishing LLC.
引用
收藏
页数:3
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