Characterization of nanoporous low dielectric constant thin films.

被引：0
|
作者：
Huang, QR [1 ]
Frank, CW [1 ]
Mecerreyes, D [1 ]
Miller, RD [1 ]
机构：
[1] Stanford Univ, Dept Chem Engn, Stanford, CA 94305 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2001年 / 221卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
436-PMSE
引用
收藏
页码：U424 / U424
页数：1
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