Characterization of nanoporous low dielectric constant thin films.

被引：0
|
作者：
Huang, QR [1 ]
Frank, CW [1 ]
Mecerreyes, D [1 ]
Miller, RD [1 ]
机构：
[1] Stanford Univ, Dept Chem Engn, Stanford, CA 94305 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2001年 / 221卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
436-PMSE
引用
收藏
页码：U424 / U424
页数：1
相关论文
共 50 条
  • [31] Characterization of low dielectric constant amorphous carbon nitride films
    Aono, M
    Nitta, S
    Katsuno, T
    Itoh, T
    Nonomura, S
    APPLIED SURFACE SCIENCE, 2000, 159 : 341 - 344
  • [32] Synthesis and characterization of templating low dielectric constant organosilicate films
    Yu, SZ
    Wong, TKS
    Hu, X
    Pita, K
    Ligatchev, V
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2004, 151 (05) : F123 - F127
  • [33] Synthesis and characterization of porous polymeric low dielectric constant films
    Xu, Y
    Zheng, DW
    Tsai, Y
    Tu, KN
    Zhao, B
    Liu, QZ
    Brongo, M
    Ong, CW
    Choy, CL
    Sheng, GTT
    Tung, CH
    JOURNAL OF ELECTRONIC MATERIALS, 2001, 30 (04) : 309 - 313
  • [34] Characterization of UV-modulated dielectric constant of ZnO thin films
    Chieh, J. J.
    Chena, Y. P.
    Yang, S. Y.
    Horng, H. E.
    Hong, Chin-Yih
    Yang, H. C.
    OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2008, 2 (02): : 81 - 84
  • [35] Facile method for preparation of ultralow dielectric constant polymer films.
    Zhou, H
    Mannari, VM
    Venumbaka, S
    Fitch, JW
    Cassidy, PE
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2003, 225 : U566 - U566
  • [36] Adhesion and dielectric strength of ultra-low dielectric constant PTFE thin films
    Rosenmayer, CT
    Bartz, JW
    Hammes, J
    LOW-DIELECTRIC CONSTANT MATERIALS III, 1997, 476 : 231 - 236
  • [37] Synthesis of mesoporous thin silica films with ultra low dielectric constant
    Yuan Hao
    Li Qing-Hua
    Sha Fei
    Xie Li-Li
    Tian Zhen
    Wang Li-Jun
    CHINESE JOURNAL OF INORGANIC CHEMISTRY, 2007, 23 (09) : 1587 - 1592
  • [38] Vapor Deposition of Low-Dielectric-Constant Polymeric Thin Films
    T. M. Lu
    J. A. Moore
    MRS Bulletin, 1997, 22 : 28 - 31
  • [39] Vapor deposition of low-dielectric-constant polymeric thin films
    Lu, TM
    Moore, JA
    MRS BULLETIN, 1997, 22 (10) : 28 - 31
  • [40] Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization
    Grill, A
    Neumayer, DA
    JOURNAL OF APPLIED PHYSICS, 2003, 94 (10) : 6697 - 6707
12345