Generation and accumulation of dislocations on the silicon surface under the action of pulse-periodic emission from a YAG:Nd laser

被引：5
|
作者：
Banishev, AF [1 ]
Golubev, VS [1 ]
Kremnev, AY [1 ]
机构：
[1] Russian Acad Sci, Inst Problems Laser & Informat Technol, Shatura 140700, Moscow Oblast, Russia
来源：
TECHNICAL PHYSICS | 2001年 / 46卷 / 08期
关键词：
Silicon; Laser Pulse; Power Density; Pulse Repetition; Silicon Surface;
D O I：
10.1134/1.1395116
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Solid-phase damage of the silicon surface due to the generation and accumulation of dislocations is studied. The dislocations are generated under the pulse-periodic action of a YAG : Nd laser. The number of laser pulses that causes surface damage vs. power density and pulse repetition period is derived. A mechanism responsible for the generation and accumulation of the dislocations at the surface is suggested. (C) 2001 MAIK "Nauka/ Interperiodica".
引用
收藏
页码：962 / 967
页数：6
相关论文
共 50 条
  • [41] Effect of the ambient atmosphere and the gas type on generation of defects and destruction of silicon surface under the action of laser pulses
    Banishev, AF
    Golubev, VS
    Kremnev, AY
    TECHNICAL PHYSICS, 2004, 49 (08) : 1035 - 1039
  • [42] Effect of the ambient atmosphere and the gas type on generation of defects and destruction of silicon surface under the action of laser pulses
    A. F. Banishev
    V. S. Golubev
    A. Yu. Kremnev
    Technical Physics, 2004, 49 : 1035 - 1039
  • [43] Femtosecond laser-induced cross-periodic structures on a crystalline silicon surface under low pulse number irradiation
    Ji, Xu
    Jiang, Lan
    Li, Xiaowei
    Han, Weina
    Liu, Yang
    Wang, Andong
    Lu, Yongfeng
    APPLIED SURFACE SCIENCE, 2015, 326 : 216 - 221
  • [44] Terahertz waves emission from plasma under action of p-polarized tightly focused laser pulse
    A. A. Frolov
    The European Physical Journal D, 2023, 77
  • [45] Terahertz waves emission from plasma under action of p-polarized tightly focused laser pulse
    Frolov, A. A.
    EUROPEAN PHYSICAL JOURNAL D, 2023, 77 (06):
  • [46] LENGTHENING OF A ND3+-YAG LASER-RADIATION PULSE UNDER CONDITIONS OF ELECTROOPTIC Q-SWITCHING WITH INTRACAVITY 2ND HARMONIC-GENERATION
    DMITRIEV, VG
    SHALAEV, EA
    KVANTOVAYA ELEKTRONIKA, 1979, 6 (01): : 225 - 230
  • [47] Tunable ultraviolet short-pulse generation from a Ce:LiCAF laser amplifier system and its sum-frequency mixing with an Nd:YAG laser
    Liu, ZL
    Sarukura, N
    Dubinskii, MA
    Semashko, VV
    Naumov, AK
    Korableva, SL
    Abdulsabirov, RY
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1998, 37 (1AB): : L36 - L38
  • [48] Tunable ultraviolet short-pulse generation from a Ce:LiCAF laser amplifier system and its sum-frequency mixing with an Nd:YAG laser
    Inst for Molecular Science , Okazaki, Japan
    Jpn J Appl Phys Part 2 Letter, 1 A-B (L36-L38):
  • [49] Emission from silicon as a real-time figure of merit for laser-induced periodic surface structure formation
    Dmytruk, Andriy
    Dmitruk, Igor
    Berezovska, Nataliya
    Karlash, Anna
    Kadan, Viktor
    Blonskyi, Ivan
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2021, 54 (26)
  • [50] SUB-1/4-MU-M PERIODIC PATTERNS WITH ND-YAG LASER AND IMAGE TRANSFER TO SILICON SURFACE BY REACTIVE ION ETCHING
    HIRAOKA, H
    SENDOVA, M
    LEE, CH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (12B): : 7135 - 7137
12345