Testing Power-Delivery TSVs

被引:0
|
作者
Li, Hua-Xuan [1 ]
Fu, Hua-Cheng [1 ]
Huang, Shi-Yu [1 ]
Jiang, Jin-Cheng [2 ]
Kwai, Ding-Ming [3 ]
Chou, Yung-Fa [3 ]
机构
[1] Natl Tsing Hua Univ, EE Dept, Hsinchu 30013, Taiwan
[2] Natl Tsing Hua Univ, Math Dept, Hsinchu 30013, Taiwan
[3] Ind Technol Res Inst, ICL, Hsinchu, Taiwan
关键词
TSV; power delivery; Defect; Ring Oscillator; Voltage-Drop; Monitoring;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Many TSVs in a 3D IC are not used for signal transmission but for power delivery. Techniques needed to detect them have not been studied in-depth in the literature. In this paper, we present a test method for power-delivery TSVs, by embedding ring-oscillator (RO) based monitors (in a scalable architecture) to detect if there is any excessive voltage-drop at the end of any TSV during a manufacturing test session. One key feature as opposed to previous RO-based methods is that our approach is able to detect the worst-case dynamic voltage-drop (occurring in a very short period of time such as 1ns), rather than just the average voltage-drop over a long period of time. This is essential in order to detect small defects inside the power delivery network. These defects, if not detected, could set off a transient timing failure when the IC is operated in a system.
引用
收藏
页码:127 / 131
页数:5
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