Design and optimisation of a MEMS-based tunable Fabry-Perot infrared filter

被引：4

作者：

Walmsley, Byron A. ^{[1
]}

Dell, John M. ^{[1
]}

Liu, Yinong ^{[2
]}

Hu, Xiao Zhi ^{[2
]}

Bush, Mark B. ^{[1
]}

Faraone, Lorenzo ^{[1
]}

机构：

[1] Univ Western Australia, Sch Elect Elect & Comp Engn, Crawley, WA 6009, Australia

[2] Univ Western Australia, Sch Mech Engn, Perth, WA 6009, Australia

来源：

2006 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS & DEVICES | 2006年

关键词：

amorphous Si; DBR mirrors; Fabry-Perot; infrared filter; plasma CVD; thin films;

D O I：

10.1109/COMMAD.2006.4429934

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study presents the theoretical design and analysis of a new surface micro-machined tuneable Fabry-Perot (FP) infrared filter for adaptive infrared photon detectors. The proposed structure uses broad spectral range, high reflectivity distributed Bragg reflector (DBR) mirrors based on amorphous Si/air layers, resulting in very high finesse filters. The device utilises three sacrificial layers to define the air-gap in the DBR mirrors, the resonant cavity spacer, and the separation of the top mirror from the supporting flexures. The flexures are fabricated from low-temperature plasma-enhanced chemical vapour deposited (PECVD) silicon nitride (SiNx) and An thin films. Separation of the top mirror from the supporting flexures allows for improved fill-factors (up to 79%), as well as increased tuning range. Optical and finite element modelling of the device has shown large wavelength tuning ranges are achievable (1.5-2.5 mu m) at low actuation voltages (<15 V), whilst still maintaining high cavity finesse.

引用

页码：272 / +

页数：2

共 50 条

[21] MEMS-BASED HIGH-Q FABRY-PEROT FILTERS
Lin, Yu-Sheng
Lee, Chengkuo
2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014, : 115 - 116
[22] Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, Norbert
Ebermann, Martin
Hiller, Karla
Kurth, Steffen
MOEMS AND MINIATURIZED SYSTEMS VI, 2007, 6466
[23] Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, Norbert
Ebermann, Martin
Kurth, Steffen
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2008, 7 (02):
[24] Micromachined mid-infrared tunable Fabry-Perot filter
Neumann, N
Hiller, K
Kurth, S
TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2005, : 1010 - 1013
[25] A hybrid-assembled mems Fabry-Perot wavelength tunable filter
Yamanoi, Toshio
Endo, Takashi
Toshiyoshi, Hiroshi
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
[26] A hybrid-assembled MEMS Fabry-Perot wavelength tunable filter
Yamanoi, Toshio
Endo, Takashi
Toshiyoshi, Hiroshi
SENSORS AND ACTUATORS A-PHYSICAL, 2008, 145 (1-2) : 116 - 122
[27] TUNABLE FABRY-PEROT FILTER FOR VISIBLE
REAY, NK
RING, J
SCADDAN, RJ
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (08): : 673 - 677
[28] Tunable spatial demultiplexer based on the Fabry-Perot filter
Sun, Xuezheng
Gu, Peifu
Li, Mingyu
Liu, Xu
Wang, Debing
Zhang, Jinlong
OPTICS EXPRESS, 2006, 14 (18): : 8470 - 8475
[29] Design, characterization and control of a large aperture MOEMS Fabry-Perot tunable infrared filter
Palmer, Jeremy A.
Hsieh, Wen-Ting
Quijada, Manuel
Mott, Brent
Akpan, Eddie
Brown, Gary L., Jr.
Jacobson, Mindy B.
Greenhouse, Matthew A.
MOEMS DISPLAY, IMAGING, AND MINIATURIZED MICROSYSTEMS IV, 2006, 6114
[30] A MEMS-based tunable infrared filter for spectroscopy
Arch, D
Ohnstein, T
Zook, D
Guckel, H
IEEE/LEOS 1996 SUMMER TOPICAL MEETINGS - ADVANCED APPLICATIONS OF LASERS IN MATERIALS AND PROCESSING, DIGEST, 1996, : C21 - C22

← 1 2 3 4 5 →