A MEMS-based tunable infrared filter for spectroscopy

被引：0
|
作者：
Arch, D [1 ]
Ohnstein, T [1 ]
Zook, D [1 ]
Guckel, H [1 ]
机构：
[1] HONEYWELL INC,CTR TECHNOL,PLYMOUTH,MN 55441
来源：
IEEE/LEOS 1996 SUMMER TOPICAL MEETINGS - ADVANCED APPLICATIONS OF LASERS IN MATERIALS AND PROCESSING, DIGEST | 1996年
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：C21 / C22
页数：2
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