A MEMS-based coupled-cavity tunable optical filter

被引：0

作者：

Gheith, M ^{[1
]}

Hussein, A ^{[1
]}

Madkour, K ^{[1
]}

Saadany, B ^{[1
]}

Khalil, D ^{[1
]}

机构：

[1] MEMSCAP Egypt, Cairo 11341, Egypt

来源：

Proceedings of the 46th IEEE International Midwest Symposium on Circuits & Systems, Vols 1-3 | 2003年

关键词：

optical filters; MEMS; DWDM systems;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this or e present the design of the first MEMS based tunable optical filter that satisfies a 20dB to 3dB band idth ratio of onl 3.. The design is based on the coupled cavit approach and its tuning is achieved using electrostatic actuation. The electromechanical simulation using the Finite Element Method (FEM) sho s a settling time in the order of tens of microseconds.

引用

页码：1026 / 1029

页数：4

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