Design and optimisation of a MEMS-based tunable Fabry-Perot infrared filter

被引：4
|
作者：
Walmsley, Byron A. [1 ]
Dell, John M. [1 ]
Liu, Yinong [2 ]
Hu, Xiao Zhi [2 ]
Bush, Mark B. [1 ]
Faraone, Lorenzo [1 ]
机构：
[1] Univ Western Australia, Sch Elect Elect & Comp Engn, Crawley, WA 6009, Australia
[2] Univ Western Australia, Sch Mech Engn, Perth, WA 6009, Australia
来源：
2006 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS & DEVICES | 2006年
关键词：
amorphous Si; DBR mirrors; Fabry-Perot; infrared filter; plasma CVD; thin films;
D O I：
10.1109/COMMAD.2006.4429934
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study presents the theoretical design and analysis of a new surface micro-machined tuneable Fabry-Perot (FP) infrared filter for adaptive infrared photon detectors. The proposed structure uses broad spectral range, high reflectivity distributed Bragg reflector (DBR) mirrors based on amorphous Si/air layers, resulting in very high finesse filters. The device utilises three sacrificial layers to define the air-gap in the DBR mirrors, the resonant cavity spacer, and the separation of the top mirror from the supporting flexures. The flexures are fabricated from low-temperature plasma-enhanced chemical vapour deposited (PECVD) silicon nitride (SiNx) and An thin films. Separation of the top mirror from the supporting flexures allows for improved fill-factors (up to 79%), as well as increased tuning range. Optical and finite element modelling of the device has shown large wavelength tuning ranges are achievable (1.5-2.5 mu m) at low actuation voltages (<15 V), whilst still maintaining high cavity finesse.
引用
收藏
页码：272 / +
页数：2
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