DEVELOPMENT OF (100) THREE-AXIS-ORIENTED SINGLE CRYSTAL (Ba0.7Sr0.3)TiO3 THIN FILM FABRICATION ON Pt/MgO(100) SUBSTRATE BY CHEMICAL SOLUTION DEPOSITION METHOD

被引：0
|
作者：
Hosokura, Tadasu [1 ]
Kageyama, Keisuke [1 ]
Takagi, Hiroshi [1 ]
Sakabe, Yukio [1 ]
机构：
[1] Murata Mfg Co Ltd, Nagaokakyo, Kyoto 6178555, Japan
来源：
ADVANCES IN MULTIFUNCTIONAL MATERIALS AND SYSTEMS | 2010年 / 216卷
关键词：
VAPOR-DEPOSITION; DIELECTRIC-PROPERTIES; (BA;
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Hetero-epitaxially grown perovskite (100) three-axis-oriented (Ba0.7Sr0.3)TiO3 thin films were prepared on (100) platinum coated (100) magnesium oxide (MgO) single crystal substrate by the chemical solution deposition method using a solution derived from Ba(CH3COO)(2), Sr(CH3COO)(2), and Ti(O-i-C3H7)(4). The growth of the film was found to depend on the heat treatment condition. A (Ba,Sr)TiO3 thin film heat treated at 800 degrees C was found to be three-axis-oriented by TEM. The film exhibited a (100) three-axis-orientation that followed the (100) orientation of the Pt substrate, as observed from an X-ray pole figure measurement and SAED patterns. The C-V measurement and the temperature dependence of the dielectric constant were performed to reveal the electrical properties of the films.
引用
收藏
页码：73 / 81
页数：9
相关论文
共 50 条
  • [21] Chemical-solution deposition of oriented (Ba0.33Sr0.67)TiO3 thin films
    Ong, RJ
    Dawley, JT
    Payne, DA
    Clem, PG
    EURO CERAMICS VIII, PTS 1-3, 2004, 264-268 : 1213 - 1216
  • [22] Effect of the strain from the substrate on tunability of (100) one-axis oriented (Ba0.5Sr0.5)TiO3 thin films
    Ito, Shinichi
    Funakubo, Hiroshi
    Koutsaroff, Ivoyl P.
    Zelner, Marina
    Cervin-Lawry, Andrew
    2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, 2007, : 198 - +
  • [23] Structure and dielectric properties of Ca-doped (Ba0.7Sr0.3) TiO3 thin films fabricated by sol-gel method
    Gao, L. N.
    Yang, X. J.
    Zhang, L. Y.
    Yao, X.
    JOURNAL OF ELECTROCERAMICS, 2008, 21 (1-4) : 645 - 648
  • [24] Dielectric properties of sol–gel synthesized SrTiO3/(Ba0.7Sr0.3)TiO3 and SrTiO3/Ba(Zr0.3Ti0.7)O3 thin film heterostructures
    A. N. Tarale
    M. M. Sutar
    D. J. Salunkhe
    P. B. Joshi
    S. B. Kulkarni
    R. C. Pawar
    C. S. Lee
    D. M. Phase
    M. Gupta
    R. J. Chaudhary
    Journal of Materials Science: Materials in Electronics, 2013, 24 : 1308 - 1318
  • [25] Dielectric properties of sol-gel synthesized SrTiO3/(Ba0.7Sr0.3)TiO3 and SrTiO3/Ba(Zr0.3Ti0.7)O3 thin film heterostructures
    Tarale, A. N.
    Sutar, M. M.
    Salunkhe, D. J.
    Joshi, P. B.
    Kulkarni, S. B.
    Pawar, R. C.
    Lee, C. S.
    Phase, D. M.
    Gupta, M.
    Chaudhary, R. J.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2013, 24 (04) : 1308 - 1318
  • [26] Electrical properties of Mg/La, Mg/Nb co-doped (Ba0.7Sr0.3)TiO3 thin films prepared by metallo-organic deposition method
    Chen, SY
    Wang, HW
    Huang, LC
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (08): : 4974 - 4978
  • [27] Improvement of dielectric properties of graded co-doped (Ba0.7Sr0.3) TiO3 thin films fabricated by sol-gel method
    Gao, L. N.
    Song, S. N.
    Zhai, J. W.
    Yao, X.
    FERROELECTRICS, 2007, 357 : 142 - 147
  • [28] Synthesis of Multiferroic Ba0.7Sr0.3TiO3-Based Thin Films for Memory Devices by Chemical Solution Deposition
    Li, Bin
    Wang, Chunqing
    Liu, Wei
    Zhong, Ying
    Zhang, Zhixin
    2012 13TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY & HIGH DENSITY PACKAGING (ICEPT-HDP 2012), 2012, : 12 - 14
  • [29] Preparation of (100)-oriented CeO2 film on (100) MgO single crystal substrate by laser chemical vapor deposition using solid precursor
    Zhao, Pei
    Huang, Zhiliang
    Mao, Yangwu
    Wang, Ying
    Takashi, Goto
    CERAMICS INTERNATIONAL, 2014, 40 (10) : 15919 - 15923
  • [30] Ba0.3Sr0.7TiO3 thin film production on atomically flat SrTiO3 (100) substrates by a pulsed laser deposition and dielectric properties
    Nakano, M
    Tabata, H
    Katayama, Y
    Kawai, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (6A): : 3564 - 3568
12345