DEVELOPMENT OF (100) THREE-AXIS-ORIENTED SINGLE CRYSTAL (Ba0.7Sr0.3)TiO3 THIN FILM FABRICATION ON Pt/MgO(100) SUBSTRATE BY CHEMICAL SOLUTION DEPOSITION METHOD

被引：0
|
作者：
Hosokura, Tadasu [1 ]
Kageyama, Keisuke [1 ]
Takagi, Hiroshi [1 ]
Sakabe, Yukio [1 ]
机构：
[1] Murata Mfg Co Ltd, Nagaokakyo, Kyoto 6178555, Japan
来源：
ADVANCES IN MULTIFUNCTIONAL MATERIALS AND SYSTEMS | 2010年 / 216卷
关键词：
VAPOR-DEPOSITION; DIELECTRIC-PROPERTIES; (BA;
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Hetero-epitaxially grown perovskite (100) three-axis-oriented (Ba0.7Sr0.3)TiO3 thin films were prepared on (100) platinum coated (100) magnesium oxide (MgO) single crystal substrate by the chemical solution deposition method using a solution derived from Ba(CH3COO)(2), Sr(CH3COO)(2), and Ti(O-i-C3H7)(4). The growth of the film was found to depend on the heat treatment condition. A (Ba,Sr)TiO3 thin film heat treated at 800 degrees C was found to be three-axis-oriented by TEM. The film exhibited a (100) three-axis-orientation that followed the (100) orientation of the Pt substrate, as observed from an X-ray pole figure measurement and SAED patterns. The C-V measurement and the temperature dependence of the dielectric constant were performed to reveal the electrical properties of the films.
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页码：73 / 81
页数：9
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