DEVELOPMENT OF (100) THREE-AXIS-ORIENTED SINGLE CRYSTAL (Ba0.7Sr0.3)TiO3 THIN FILM FABRICATION ON Pt/MgO(100) SUBSTRATE BY CHEMICAL SOLUTION DEPOSITION METHOD

被引：0

作者：

Hosokura, Tadasu ^{[1
]}

Kageyama, Keisuke ^{[1
]}

Takagi, Hiroshi ^{[1
]}

Sakabe, Yukio ^{[1
]}

机构：

[1] Murata Mfg Co Ltd, Nagaokakyo, Kyoto 6178555, Japan

来源：

ADVANCES IN MULTIFUNCTIONAL MATERIALS AND SYSTEMS | 2010年 / 216卷

关键词：

VAPOR-DEPOSITION; DIELECTRIC-PROPERTIES; (BA;

D O I：

暂无

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Hetero-epitaxially grown perovskite (100) three-axis-oriented (Ba0.7Sr0.3)TiO3 thin films were prepared on (100) platinum coated (100) magnesium oxide (MgO) single crystal substrate by the chemical solution deposition method using a solution derived from Ba(CH3COO)(2), Sr(CH3COO)(2), and Ti(O-i-C3H7)(4). The growth of the film was found to depend on the heat treatment condition. A (Ba,Sr)TiO3 thin film heat treated at 800 degrees C was found to be three-axis-oriented by TEM. The film exhibited a (100) three-axis-orientation that followed the (100) orientation of the Pt substrate, as observed from an X-ray pole figure measurement and SAED patterns. The C-V measurement and the temperature dependence of the dielectric constant were performed to reveal the electrical properties of the films.

引用

页码：73 / 81

页数：9

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