(100) Three-Axis-Oriented BaTiO3, (Ba0.7Sr0.3)TiO3 Thin Film Prepared by Chemical Solution Deposition Method

被引:0
|
作者
Hosokura, Tadasu [1 ]
Kageyama, Keisuke [1 ]
Takagi, Hiroshi [1 ]
Sakabe, Yukio [1 ]
机构
[1] Murata Mfg Co Ltd, Nagaokakyo, Kyoto 6178555, Japan
关键词
CRYSTAL-STRUCTURE; DIELECTRIC-PROPERTIES; BARIUM-TITANATE; DEPENDENCE; (BA;
D O I
10.1111/j.1744-7402.2011.02668.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Epitaxially grown (100) three-axis-oriented (Ba0.7Sr0.3)TiO3 thin film on (100) platinum (Pt) coated (100) magnesium oxide (MgO) substrate and (100) three-axis-oriented BaTiO3 thin film with BaZrO3 buffer layer were prepared on an MgO(100) substrate using the chemical solution deposition method. The growth of the film was found to depend on the annealing condition. Transmission electron microscope revealed cube-on-cube epitaxial growth. The thin films exhibited a (100) three-axis-orientation that followed the (100) orientation of the MgO substrate and the (100) orientation of the Pt or BaZrO3 bottom layer, as observed from an X-ray pole figure measurement and the selected area electron diffraction patterns.
引用
收藏
页码:74 / 82
页数:9
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