(100) Three-Axis-Oriented BaTiO3, (Ba0.7Sr0.3)TiO3 Thin Film Prepared by Chemical Solution Deposition Method

被引：0
|
作者：
Hosokura, Tadasu [1 ]
Kageyama, Keisuke [1 ]
Takagi, Hiroshi [1 ]
Sakabe, Yukio [1 ]
机构：
[1] Murata Mfg Co Ltd, Nagaokakyo, Kyoto 6178555, Japan
来源：
INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY | 2012年 / 9卷 / 01期
关键词：
CRYSTAL-STRUCTURE; DIELECTRIC-PROPERTIES; BARIUM-TITANATE; DEPENDENCE; (BA;
D O I：
10.1111/j.1744-7402.2011.02668.x
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Epitaxially grown (100) three-axis-oriented (Ba0.7Sr0.3)TiO3 thin film on (100) platinum (Pt) coated (100) magnesium oxide (MgO) substrate and (100) three-axis-oriented BaTiO3 thin film with BaZrO3 buffer layer were prepared on an MgO(100) substrate using the chemical solution deposition method. The growth of the film was found to depend on the annealing condition. Transmission electron microscope revealed cube-on-cube epitaxial growth. The thin films exhibited a (100) three-axis-orientation that followed the (100) orientation of the MgO substrate and the (100) orientation of the Pt or BaZrO3 bottom layer, as observed from an X-ray pole figure measurement and the selected area electron diffraction patterns.
引用
收藏
页码：74 / 82
页数：9
相关论文
共 50 条
  • [41] Dielectric Properties of (Ba,Sr)TiO3 Thin Films With Varied Microstructures Prepared by the Chemical Solution Deposition Method for Thin-Film Capacitors and Ferroelectric Varactors
    Kageyama, Keisuke
    Hosokura, Tadasu
    Nakaiso, Toshiyuki
    Takagi, Hiroshi
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2010, 57 (10) : 2198 - 2204
  • [42] Structure and dielectric properties of Ca-doped (Ba0.7Sr0.3) TiO3 thin films fabricated by sol-gel method
    Gao, L. N.
    Yang, X. J.
    Zhang, L. Y.
    Yao, X.
    JOURNAL OF ELECTROCERAMICS, 2008, 21 (1-4) : 645 - 648
  • [43] Effect of ozone treatment on the electrical properties of (Ba0.7Sr0.3)TiO3 thin films -: art. no. 114904
    Halder, S
    Schneller, T
    Meyer, R
    Waser, R
    JOURNAL OF APPLIED PHYSICS, 2005, 97 (11)
  • [44] High velocity oxy-fuel and plasma deposition of BaTiO3 and (Ba,Sr)TiO3
    Dent, AH
    Patel, A
    Gutleber, J
    Tormey, E
    Sampath, S
    Herman, H
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 87 (01): : 23 - 30
  • [45] 射频磁控溅射法制备(Ba0.7Sr0.3)TiO3铁电薄膜
    刘世建
    徐重阳
    曾祥斌
    赵伯芳
    王长安
    史济群
    压电与声光, 2001, (04) : 293 - 295
  • [46] (Ba0.7Sr0.3)TiO3铁电薄膜热敏电容器的研制
    刘世建
    徐重阳
    曾祥斌
    赵伯芳
    华中理工大学学报, 2000, (10) : 70 - 71
  • [47] Thermal desorption spectroscopy of (Ba,Sr)TiO3 thin films prepared by chemical vapor deposition
    Yamamuka, Mikio
    Kawahara, Takaaki
    Makita, Tetsuro
    Yuuki, Akimasa
    Ono, Kouichi
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (2 A): : 729 - 735
  • [48] Thermal desorption spectroscopy of (Ba, Sr)TiO3 thin films prepared by chemical vapor deposition
    Yamamuka, M
    Kawahara, T
    Makita, T
    Yuuki, A
    Ono, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (2A): : 729 - 735
  • [49] Temperature- and field-dependent leakage current of Pt/(Ba0.7Sr0.3)TiO3 interface
    Yang, H
    Chen, B
    Tao, K
    Qiu, XG
    Xu, B
    Zhao, BR
    APPLIED PHYSICS LETTERS, 2003, 83 (08) : 1611 - 1613
  • [50] Improvement of dielectric properties of graded co-doped (Ba0.7Sr0.3) TiO3 thin films fabricated by sol-gel method
    Gao, L. N.
    Song, S. N.
    Zhai, J. W.
    Yao, X.
    FERROELECTRICS, 2007, 357 : 142 - 147
12345