Design and test of MEMS

被引：5
|
作者：
Courtois, B [1 ]
Karam, JM [1 ]
Mir, S [1 ]
Lubaszewski, M [1 ]
Székely, V [1 ]
Rencz, M [1 ]
Hofmann, K [1 ]
Glesner, M [1 ]
机构：
[1] TIMA Lab, F-38031 Grenoble, France
来源：
TWELFTH INTERNATIONAL CONFERENCE ON VLSI DESIGN, PROCEEDINGS | 1999年
关键词：
microsystems; microelectromechanical systems; CAD; manufacturing; testing;
D O I：
10.1109/ICVD.1999.745160
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper is dealing with design, simulation and test of MEMS (microelectromechanical systems). Bath existing tools and open research areas are addressed. An appropriate Computer-Aided Design (CAD) environment is presented. Similarities between the present development of,MEMS and the development of microelectronics decades ago are pointed out, including the migration front point tools to CAD frameworks, testing and Intellectual Property (IP) issues.
引用
收藏
页码：270 / 275
页数：6
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