Design and Test of the MEMS Coupled Piezoelectric-Electromagnetic Energy Harvester

This paper researches on the design and test of the output performance of double-end clamped MEMS coupled piezoelectric-electromagnetic energy harvester. It establishes the theoretical output model of the double-end clamped rectangular beam and trapezoidal beam piezoelectric-electromagnetic energy harvester, and optimizes the structure parameters of piezoelectric and electromagnetic unit with simulation analysis. It also respectively realizes the processing of piezoelectric and electromagnetic unit by MEMS and flexible PCB technology, and completes the performance test of structure prototype through the experimental system. The result showed that the capacity of MEMS coupled piezoelectric-electromagnetic energy harvester, which taked four coil piezoelectric with integrated electromagnetic in series, was 12.23 times higher than that of piezoelectric energy harvester. Also the output voltage and power of coupled trapezoidal beam energy harvester were respectively increased 18.89% and 2.26%, compared with coupled rectangular beam energy harvester.