共 50 条
- [21] Electron distribution function in the cylindrical magnetron DC discharge INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS, 1999, : 147 - +
- [23] MEASUREMENT OF IONIZATION OF ARGON BY COLLISIONS WITH NEON METASTABLES BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (02): : 192 - 193
- [25] MODELING OF THE ENERGY DEPOSITION MECHANISMS IN AN ARGON MAGNETRON PLANAR DISCHARGE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (01): : 133 - 140
- [26] Electrons distribution function for an Argon magnetron discharge with an Aluminium target VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 2002, 57 (304): : 316 - +
- [27] Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2019, 37 (03):
- [29] Plasmadynamical peculiarities of the cylindrical magnetron-type gas discharge PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2008, (04): : 189 - 194
- [30] Electrical and optical characterization of a pulsed discharge in an inverted cylindrical magnetron PLASMA SOURCES SCIENCE & TECHNOLOGY, 2014, 23 (04):