On the density of argon metastables in a cylindrical magnetron discharge

被引:0
|
作者
Vitelaru, C. [1 ]
Tiron, V. [1 ]
Andrei, C. [1 ]
Dobrea, S. [1 ]
Popa, G. [1 ]
机构
[1] Alexandru Ioan Cuza Univ, Fac Phys, Iasi 700506, Romania
来源
关键词
cylindrical magnetron; TDLAS; argon metastable density;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The experimental results are presented regarding spatial distribution of the argon metastable atoms density and corresponding temperature in a cylindrical magnetron discharge with aluminium target. The measurements were performed using a tunable diode laser system with narrow line width (1 MHz), allowing us to obtain good resolution of the absorption spectral line. The main broadening process of the spectral lines in the discharge is Doppler one due to the thermal energy of the particles and rather low gas pressure. The laser was tuned linearly around wavelength 811.531 nm, which corresponds to the absorption wavelength for argon metastables atoms.
引用
收藏
页码:2003 / 2006
页数:4
相关论文
共 50 条
  • [21] Electron distribution function in the cylindrical magnetron DC discharge
    Csambal, C
    Behnke, JF
    Tichy, M
    Kudrna, P
    Golubovskii, YB
    Porokhova, IA
    INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS, 1999, : 147 - +
  • [22] PIC-MCC modeling of the cylindrical magnetron discharge
    Kudrna, P
    Holík, M
    Porokhova, IA
    Golubovskii, YB
    Tichy, A
    Behnke, JF
    PLASMA PHYSICS, 2003, 669 : 486 - 489
  • [23] MEASUREMENT OF IONIZATION OF ARGON BY COLLISIONS WITH NEON METASTABLES
    RHYMES, T
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (02): : 192 - 193
  • [24] Radio-frequency magnetron discharge in methane, argon, and methane-argon mixture
    Avtaeva, SV
    Mamytbekov, MZ
    Otorbaev, DK
    HIGH TEMPERATURE, 1998, 36 (02) : 176 - 182
  • [25] MODELING OF THE ENERGY DEPOSITION MECHANISMS IN AN ARGON MAGNETRON PLANAR DISCHARGE
    GUIMARAES, F
    ALMEIDA, J
    BRETAGNE, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (01): : 133 - 140
  • [26] Electrons distribution function for an Argon magnetron discharge with an Aluminium target
    Mihaila, I
    Popa, G
    Anita, V
    Costin, C
    Sirghi, L
    Turcu, I
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 2002, 57 (304): : 316 - +
  • [27] Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling
    Mathioudaki, Stella
    Vandenabeele, Cedric
    Tonneau, Romain
    Pflug, Andreas
    Lucas, Stephane
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2019, 37 (03):
  • [28] PIC-MCC modeling of the DC discharge in cylindrical magnetron
    Kudrna, P
    Holík, M
    Tichy, M
    Csambal, C
    Behnke, JF
    CZECHOSLOVAK JOURNAL OF PHYSICS, 2002, 52 : 666 - 672
  • [29] Plasmadynamical peculiarities of the cylindrical magnetron-type gas discharge
    Goncharov, A. A.
    Dobrovol's'Kii, A. N.
    Evsyukov, A. M.
    Protsenko, I. M.
    Litovko, I. V.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2008, (04): : 189 - 194
  • [30] Electrical and optical characterization of a pulsed discharge in an inverted cylindrical magnetron
    Vozniy, O. V.
    Duday, D.
    Luciu, I.
    Wirtz, T.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2014, 23 (04):