Electron distribution function in the cylindrical magnetron DC discharge

被引:0
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作者
Csambal, C [1 ]
Behnke, JF [1 ]
Tichy, M [1 ]
Kudrna, P [1 ]
Golubovskii, YB [1 ]
Porokhova, IA [1 ]
机构
[1] Ernst Moritz Arndt Univ Greifswald, Inst Phys, Domstr 10A, D-17487 Greifswald, Germany
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中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
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页码:147 / +
页数:2
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