Electron distribution function in the cylindrical magnetron DC discharge

被引:0
|
作者
Csambal, C [1 ]
Behnke, JF [1 ]
Tichy, M [1 ]
Kudrna, P [1 ]
Golubovskii, YB [1 ]
Porokhova, IA [1 ]
机构
[1] Ernst Moritz Arndt Univ Greifswald, Inst Phys, Domstr 10A, D-17487 Greifswald, Germany
来源
INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS | 1999年
关键词
D O I
暂无
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
引用
收藏
页码:147 / +
页数:2
相关论文
共 50 条
  • [31] ELECTRON-ENERGY DISTRIBUTION FUNCTION IN DC MAGNETRON AXIALLY-SYMMETRICAL DISCHARGES - EVIDENCE OF SPATIAL ANISOTROPY
    IVANOV, I
    KAZANSKY, P
    HULTMAN, L
    SUNDGREN, JE
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1994, 27 (02) : 280 - 285
  • [32] Stable plasma configurations in a cylindrical magnetron discharge
    Levchenko, I
    Romanov, M
    Keidar, M
    Beilis, II
    APPLIED PHYSICS LETTERS, 2004, 85 (12) : 2202 - 2204
  • [33] On the density of argon metastables in a cylindrical magnetron discharge
    Vitelaru, C.
    Tiron, V.
    Andrei, C.
    Dobrea, S.
    Popa, G.
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2008, 10 (08): : 2003 - 2006
  • [34] Effect of E × B electron drift and plasma discharge in dc magnetron sputtering plasma
    Sankar Moni Borah
    Arup Ratan Pal
    Heremba Bailung
    Joyanti Chutia
    Chinese Physics B, 2011, (01) : 439 - 447
  • [35] CYLINDRICAL MAGNETRON DISCHARGES .2. THE FORMATION OF DC BIAS IN RF-DRIVEN DISCHARGE SOURCES
    YEOM, GY
    THORNTON, JA
    KUSHNER, MJ
    JOURNAL OF APPLIED PHYSICS, 1989, 65 (10) : 3825 - 3832
  • [36] Anisotropy and nonlocality of the electron distribution function of the low-pressure DC discharge in CF4
    Volynets, VN
    Ivanov, VV
    Rakhimov, AT
    Rakhimova, TV
    Slovetskii, DI
    PLASMA PHYSICS REPORTS, 1997, 23 (01) : 62 - 70
  • [37] Formation of inverse electron distribution function and absolute negative conductivity in nonlocal plasma of a dc glow discharge
    Yuan, Chengxun
    Yao, Jingfeng
    Bogdanov, E. A.
    Kudryavtsev, A. A.
    Zhou, Zhongxiang
    PHYSICAL REVIEW E, 2020, 101 (03)
  • [38] Correlation between plasma glow intensity distribution and sputtering profile in dc magnetron discharge
    Pal, A. F.
    Ryabinkin, A. N.
    Serov, A. O.
    XXXIII INTERNATIONAL CONFERENCE ON EQUATIONS OF STATE FOR MATTER, 2019, 1147
  • [39] A CYLINDRICAL CAVITY FILLED WITH A DC DISCHARGE
    STUART, GW
    ROSEN, P
    JOURNAL OF APPLIED PHYSICS, 1951, 22 (02) : 236 - 236
  • [40] SPECTROSCOPIC STUDY OF A DC GAS MAGNETRON DISCHARGE
    MILJEVIC, VI
    APPLIED OPTICS, 1983, 22 (06) : 904 - 907