Electron distribution function in the cylindrical magnetron DC discharge

被引：0
|
作者：
Csambal, C [1 ]
Behnke, JF [1 ]
Tichy, M [1 ]
Kudrna, P [1 ]
Golubovskii, YB [1 ]
Porokhova, IA [1 ]
机构：
[1] Ernst Moritz Arndt Univ Greifswald, Inst Phys, Domstr 10A, D-17487 Greifswald, Germany
来源：
INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS | 1999年
关键词：
D O I：
暂无
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
引用
收藏
页码：147 / +
页数：2
相关论文
共 50 条
  • [41] SPECTROSCOPIC STUDY OF THE DC GAS MAGNETRON DISCHARGE
    MILJEVIC, VI
    JOURNAL DE PHYSIQUE, 1979, 40 : 61 - 62
  • [42] Anisotropy of the electron component in a cylindrical magnetron discharge. I. Theory of the multiterm analysis
    Porokhova, IA
    Golubovskii, YB
    Behnke, JF
    PHYSICAL REVIEW E, 2005, 71 (06):
  • [43] DC Magnetron Discharge with Pure Calcium Target
    Shandrikov, M. V.
    Oks, E. M.
    Cherkasov, A. A.
    RUSSIAN PHYSICS JOURNAL, 2024, 67 (08) : 1266 - 1270
  • [44] Simplified model for the DC planar magnetron discharge
    Buyle, G
    Depla, D
    Eufinger, K
    Haemers, J
    De Bosscher, W
    De Gryse, R
    VACUUM, 2004, 74 (3-4) : 353 - 358
  • [45] Electron velocity distribution functions in a sputtering magnetron discharge for the E × B direction
    Sheridan, T.E.
    Goeckner, M.J.
    Goree, J.
    Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998, 16 (04):
  • [46] Spatial electron density distribution in a high-power pulsed magnetron discharge
    Bohlmark, J
    Gudmundsson, JT
    Alami, J
    Latteman, M
    Helmersson, U
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (02) : 346 - 347
  • [47] Cylindrical DC magnetron sputtering assisted by microwave plasma
    Yonesu, Akira
    Kato, Takashi
    Takemoto, Hiroki
    Nishimura, Naoki
    Yamashiro, Yasumasa
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (7 B): : 4326 - 4328
  • [48] Cylindrical DC magnetron sputtering assisted by microwave plasma
    Yonesu, A
    Kato, T
    Takemoto, H
    Nishimura, N
    Yamashiro, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (7B): : 4326 - 4328
  • [49] Diffusion model of cylindrical magnetron discharge in argon.
    Golubovskii, YB
    Porokhova, IA
    Csambal, C
    Behnke, J
    Behnke, JF
    INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS, 1999, : 139 - 140
  • [50] DISCHARGE IN A PENNING TUBE AND IN A CYLINDRICAL MAGNETRON AT LOW PRESSURES
    SMIRNITS.GV
    TI, NK
    SOVIET PHYSICS TECHNICAL PHYSICS-USSR, 1969, 14 (04): : 522 - &
12345