Dimensional Metrology with Atomic Force Microscopy

被引：0
|
作者：
Dixson, Ronald [1 ]
Orji, Ndubuisi G. [1 ]
机构：
[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
来源：
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2012年 / 11卷 / 01期
关键词：
D O I：
10.1117/1.JMM.11.1.011001
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：1
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