Design and system-level simulation of a capacitive dual axis accelerometer

被引：0
|
作者：
Chen, Weiping [1 ]
Ding, Jinling [1 ]
Liu, Xiaowei [1 ]
Wang, Chao [1 ]
机构：
[1] Harbin Inst Technol, MEMS Ctr, Harbin 150006, Peoples R China
来源：
2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2007年
关键词：
micromachined accelerometer; capacitance sensing; system-level model;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A system-level model of a bulk micromachined dual axis accelerometer is presented. The accelerometer has only one inertial mass, symmetrically suspended by four pairs of folded elastic beams. The size of the fabricated accelerometer is 5.4 x 5.4 mm(2). The displacement change of the inertial mass is converted to the change of differential capacitance between active combs and fixed combs. Generally, the input acceleration is mixed with the x-axis and the y-axis. In order to separate and pick off the mixed signal, the frequency-division method is adopted in the interface circuit. The paper details the Simulink model, which is used to evaluate the feasibility of the detective method. The simulation results validate the feasibility that the interface circuit can detect dual-axis acceleration separately and synchronously.
引用
收藏
页码：337 / +
页数：2
相关论文
共 50 条
  • [1] DESIGN, ANALYSIS AND SYSTEM-LEVEL MODELLING OF A SINGLE AXIS CAPACITIVE ACCELEROMETER
    Mohammed, Zakriya
    Waheed, Owais Talaat
    Elfadel, Ibrahim M.
    Chatterjee, Aveek
    Rasras, Mahmoud
    [J]. PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2016, VOL. 10, 2017,
  • [2] Design and Simulation of a MEMS Based Dual Axis Capacitive Accelerometer
    Jayanetti, V. C.
    Jayathilaka, W. A. D. M.
    Talawatta, K. I.
    Amarasinghe, Y. W. R.
    [J]. 2015 Moratuwa Engineering Research Conference (MERCon), 2015, : 194 - 198
  • [3] System-level simulation and implementation for a high Q capacitive accelerometer with PD feedback compensation
    Zhaohui Song
    Teng Sun
    Jian Wu
    Lufeng Che
    [J]. Microsystem Technologies, 2015, 21 : 2233 - 2240
  • [4] System-level simulation and implementation for a high Q capacitive accelerometer with PD feedback compensation
    Song, Zhaohui
    Sun, Teng
    Wu, Jian
    Che, Lufeng
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 21 (10): : 2233 - 2240
  • [5] Design of Proof Mass and System-level Simulation of a Micromachined Electrostatically Suspended Accelerometer
    Wan, Z.
    Cui, F.
    Zhang, Y. K.
    Liu, W.
    Chen, W. Y.
    Zhang, W. P.
    [J]. EQUIPMENT MANUFACTURING TECHNOLOGY AND AUTOMATION, PTS 1-3, 2011, 317-319 : 1631 - 1634
  • [6] Modeling and system-level simulation of a CMOS convective accelerometer
    Leman, O.
    Chaehoi, A.
    Mailly, F.
    Latorre, L.
    Nouet, P.
    [J]. SOLID-STATE ELECTRONICS, 2007, 51 (11-12) : 1609 - 1617
  • [7] Simulation libraries for system-level design
    Advanced Research Projects Agency
    [J]. Computer, 2 (76-77):
  • [8] SIMULATION LIBRARIES FOR SYSTEM-LEVEL DESIGN
    RICHARDS, MA
    [J]. COMPUTER, 1995, 28 (02) : 76 - 77
  • [9] System-level simulation and experiment for levitation control of micromachined electrostatically suspended accelerometer
    Xiao, Qijun
    Cui, Feng
    Luo, Zhonghui
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018, 24 (12): : 4895 - 4907
  • [10] System-level simulation and experiment for levitation control of micromachined electrostatically suspended accelerometer
    Qijun Xiao
    Feng Cui
    Zhonghui Luo
    [J]. Microsystem Technologies, 2018, 24 : 4895 - 4907
12345