Design of Proof Mass and System-level Simulation of a Micromachined Electrostatically Suspended Accelerometer

被引：2
|
作者：
Wan, Z. [1 ]
Cui, F. [1 ]
Zhang, Y. K. [1 ]
Liu, W. [1 ]
Chen, W. Y. [1 ]
Zhang, W. P. [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Res Inst Micro & Nano Sci & Technol, Natl Key Lab Nano Micro Fabricat Technol, Shanghai 200240, Peoples R China
来源：
EQUIPMENT MANUFACTURING TECHNOLOGY AND AUTOMATION, PTS 1-3 | 2011年 / 317-319卷
关键词：
Micromachined accelerometer; Electrostatic Suspension; Squeeze film damping; System-level model;
D O I：
10.4028/www.scientific.net/AMR.317-319.1631
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A six-axis Micromachined Electrostatically Suspended Accelerometer (MESA) which is based on LIGA-type microfabrication was designed. MESA employs a levitated perforated plate as its proof mass. Three main purposes are considered for the design of the perforated proof mass: (1) reducing squeeze-film effect; (2) improving the dynamic response of MESA; (3) facilitating the etching of sacrificial layer under the plate. This paper utilized a finite element model for evaluating air squeeze film damping effect of perforated proof mass. Among several designs of perforated proof mass, the best choice was found. Besides, a system-level model created in CoventorWare is used to evaluate the effect of squeeze film damping and the dynamic response of the MESA.
引用
收藏
页码：1631 / 1634
页数：4
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