System-level simulation and implementation for a high Q capacitive accelerometer with PD feedback compensation

被引：6
|
作者：
Song, Zhaohui [1 ]
Sun, Teng [1 ]
Wu, Jian [1 ]
Che, Lufeng [1 ]
机构：
[1] Chinese Acad Sci, State Key Lab Transducer Technol, Sci & Technol Microsyst Lab, Shanghai Inst Microsyst & Informat Technol, Shanghai, Peoples R China
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2015年 / 21卷 / 10期
基金：
国家高技术研究发展计划(863计划);
关键词：
Step Response; Proof Mass; System Level Simulation; Feedback Compensation; Force Phase;
D O I：
10.1007/s00542-014-2315-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Based on the challenge of high-Q capacitive accelerometer, the analysis of the structure and the dynamic response of an all-silicon sandwich accelerometer are conducted. An analog closed-loop interface circuit based on proportional-differential feedback compensation is designed and simulated by SIMULINK/SIMSCAPE in order to stabilize the sensor and increase the closed-loop damping. Based on the design, a printed circuit board level circuit and an ASIC circuit are made for the test. Simulation and measurement are provided to support the design. Measurement results show that the circuit effectively improves the dynamic response time of the system. The accelerometer with ASIC circuit has the scale factor of 0.9976 V/g and the second order non-linearity of -400 ppm g/g(2) in the range of +/- 1 g, the average noise floor is 2 mu g/root Hz (0-200 Hz).
引用
收藏
页码：2233 / 2240
页数：8
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